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MNMT-Dublin Symposium VII: A Critical Look at the Foundations of Interferometric Surface Topography Measurement

MNMT-Dublin Symposium VII: A Critical Look at the Foundations of Interferometric Surface Topography Measurement

by MNMT-Dublin

Doctor Peter de Groot was invited to give a lecture at MNMT-Dublin Symposium on the topic of interferometric surface topography measurement on 26th February. Some common ways of defining instrument response, including the instrument transfer function or ITF, were presented in details.

Dr. Groot is the Executive Director of R&D at Zygo Corporation, where he heads the Innovations Group, tasked with solving the challenging problems in optical metrology. He is also the Honorary Professor at the University of Nottingham. Dr. Groot is an inventor for 135 US patents, an author of 160 papers and book chapters, a member of the Board of Directors for the SPIE and an active member of the Applied Optics Community.

fengzhou.fang@ucd.ie

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Centre of Micro/Nano Manufacturing Technology (MNMT-Dublin) 

School of Mechanical and Materials Engineering

University College Dublin,

Belfield Dublin 4, Dublin, Ireland

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Last updated: 10:40  12  August, 2020